Strasbaugh Plumbing Description
Version 4.0 -February 1998 7 - 7
Whenever slurry is required to flow, slurry solenoid valves located between the
peristaltic pumps and the slurry pumps are enabled; the peristaltic pumps are
then energized to deliver slurry to the polish table at the programmed rate. Each
slurry peristaltic pump has its own delivery line terminating within one inch
above the center of the polish table. The last 12 inches of the delivery line for
each slurry pump is bundled together with a D.I. water line. A swing bracket
mounted straight back on the splash guard and behind the polish table supports
the line bundle. The bundled lines can be positioned away from the polish table
by pushing them to the back of the machine toward the right. A bolt adjuster
determines where the bundled lines rest above the polish table.
The flow rate is controlled by an analog channel output to the motor control
board for the peristaltic pump. The faster the pump rotates, the greater the
volume of slurry delivered. Both peristaltic pumps are mounted onto a frame
member located at the right side of the machine behind the polish table. They are
accessible through the right top service door. The motor control boards for the
slurry 1 and slurry 2 peristaltic pumps, 1SCR and 2SCR, are mounted to the
back panel inside the right electrical cabinet along the top.
The following is a component overview of the slurry 1 delivery system:
When slurry is demanded, the diaphragm pump draws slurry out of the slurry 1
tank, and the slurry enable solenoid valve is activated; some slurry returns to the
tank through a strainer; the majority is cycled around a closed loop consisting of
the slurry 1 pH transmitter and the return line for the slurry 1 tank. Solenoid 77
is a two-way valve, either open or closed. The “In” port is tied into the return
loop, allowing slurry to flow through the return loop and supplying pressure to
the peristaltic pump. When a slurry flush is required, solenoid 77 is closed, and
solenoid 34 is energized, permitting D. I. water to go to the peristaltic pump.
(Solenoid 34 is a two-way valve with a D. I. water input.) The control computer
energizes the slurry 1 peristaltic pump through analog output channel 14 and the
slurry 1 motor control board. The flow rate is proportional to the 0 to 5 volt
analog output signal. The peristaltic pumps, energized for the programmed flow
rate and duration, pump D.I. water through the peristaltic pumps themselves, the
delivery lines, and onto the polish table. During the flush cycle, the diaphragm
pumps continue to pump, keeping the slurry recycling.
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