Maintenance Model 6DS-SP Planarizer
7 - 8 Version 4.0 - February 1998
The following is a component overview of the slurry 2 delivery system: The
slurry 2 delivery system is identical to that of the slurry 1 delivery system with
the exception that
• solenoid 37 performs the function for slurry 2 provided for slurry 1 by
solenoid 34.
• solenoid 78 performs the function for slurry 2 provided for slurry 1 by
solenoid 77.
• the control computer energizes the slurry 2 peristaltic pump through
analog output channel 15 and the slurry 2 motor control board.
CHEMICAL SYSTEM
The optional chemical system supplies chemical left and right load rinse,
chemical left and right cleaning stations, and chemical curtain rinse. Chemical
rinsing is selected at the Machine Parameters Menu (page 2) by toggling
between D. I. water and chemical rinsing for the load stations, cleaning stations,
and curtain rinse.
DRAIN SYSTEM
The drain system consists of drain tubs (surrounding the elevator assembly , the
shuttle assembly, and the polish table assembly) and hoses for exporting the
collected waste fluids. The elevator and shuttle drain tubs tie together and exit
the machine. The polish table drain tub has a separate line.
The drain tubs are constructed of polypropylene for strength and resistance to
damage from many types of fluids. The bottoms are inclined to collect waste
fluids to a drainpipe. Elevator and shuttle waste fluid is primarily D.I. water;
polish table waste is primarily slurry solution. The drainpipe from each drain tub
terminates at the bottom rear of the machine's back panel to separate
connections. Each connection is a 1 1/2-inch threaded PVC pipe for joining to
inhouse drain lines. The polish table drain has a cleanout port for clearing out
debris.
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