Strasbaugh Preventive Maintenance Schedules
Version 4.0 - February 1998 8 - 5
DAILY PREVENTIVE
MAINTENANCE SCHEDULE
SUBJECT ACTION
• Slurry Lines, Slurry System
• Wafer Backing Insert
• Wafer Template Ring
Operate Slurry Flush Cycle once each
shift.
Flush lines before every pad change,
before the machine is to sit idle for more
than 30 minutes, and after the machine
has been sitting idle for more than 30
minutes.
Inspect and change each shift.
Inspect and change each shift.
To Next Page
Loading...
