Strasbaugh 6DS-SP - Page 496

Maintenance Model 6DS-SP Planarizer
8 - 6 Version 4.0 - February 1998
7-DAY PREVENTIVE
MAINTENANCE SCHEDULE
SUBJECT ACTION
• Bridge Section
• Conditioning Device
• Control Program and Recipe Data,
Calibration Variable Values
• Coolant/Table Temperature Readings
• Elevator/Robot Section
• Fluid/Solenoid Cabinet
• Machine Cabinet
• Polish Section
• Screen and Drain Pans for Table(s),
Elevators, Shuttle
• Single Table Shuttle Assembly
Clean and check:
Bridge covers, spindles, vacuum chucks.
Check conditioning device for cleanliness and
condition. Clean pan.
Backup after every change session.
Crosscheck coolant and table temperature
readings.
Clean and Check:
Elevator platforms and uprights, elevator
tanks inside and out, elevator bases, robot “R”
axis arm.
Fluid/solenoid cabinet leak check.
Clean operator doors inside and out.
Clean and check each of the following:
Conditioning arm, splash ring, table top and
sides, table pan, back splash shield, slurry
motor panel, and inside of operator doors.
Clean screen and drain pans for table(s),
elevators, and shuttle.
Clean and check:
Load chucks, load rings, load station buckets,
cleaning station devices, cleaning station
rollers, cleaning station buckets, upper and
lower shuttle plates.