Strasbaugh 6DS-SP - Page 497

Strasbaugh Preventive Maintenance Schedules
Version 4.0 - February 1998 8 - 7
7-DAY PREVENTIVE
MAINTENANCE SCHEDULE
SUBJECT ACTION
• Slurry Distribution Lines
• Slurry Storage Tanks
• Slurry System
• Table Coolant Inlet, Outlet Gauges
• Table 1
• Two Table Shuttle Assembly
• Under Polish Table, on Floor
Check slurry distribution lines for
condition and leaks; replace as needed.
Drain, wipe out, rinse out filter screen,
and reassemble.
Clean and check slurry pumps and motor
panel.
Ensure pressures are correct on table
coolant inlet and outlet gauges.
Clean and check splash ring, table top
and sides, and back shield.
Clean and check:
Load chucks, load rings, load station tray,
table top and sides, table pan, and top,
middle, bottom shuttle plates.
Check slurry distribution lines for
condition and leaks; replace as needed.