Maintenance Model 6DS-SP Planarizer
9 - 14 Version 4.0 - February 1998
Install new insert on carrier:
8. Install the two insert alignment pins (supplied by Strasbaugh with the
machine) in the two alignment holes--one on each side of the wafer
mounting plate.
9. Peel back the backing past center on the new insert, exposing more than
half of the pad (such that it will clear the two alignment notches).
10. Fold the backing under past the center of the pad.
11. Place the new insert on the wafer mounting plate (backing side down)
and align its two notches with the alignment pins.
12. While continuing to maintain hole alignment, press the exposed
adhesive portion of the pad down onto the carrier bottom.
13. Remove the alignment pins.
14. Lift the backed portion of the pad and peel off the remaining backing.
15. Working from the previously placed portion of the pad, smooth the
remaining pad into place.
Punch holes in the new insert:
1. Lay the carrier hole template plate on the insert.
2. Install the alignment pins.
3. Use the carrier hole punch device to punch holes in the insert:
• Push down firmly at each template hole.
4. Remove the alignment pins.
5. Remove the template.
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