Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 15
ASSEMBLY AND DISASSEMBLY OF A
CARRIER
Notes:
Unless otherwise stated in the text, the measurement values shown in the
procedures below are written for assembly of an eight-inch carrier.
With the exception of Section J., Wafer Backing Plate Adjustment (required for
three-, four-, and five-inch carriers only) the assembly instructions are
appropriate for Strasbaugh eight-, six-, five-, four-, and three-inch wafer carriers.
ASSEMBLY OF A CARRIER
A detailed knowledge of carrier assembly procedures is essential for
• replacement of worn parts
• changing of shim sizes
SUMMARY
A. Assemble Carrier Top Plate
B. Install Bearings in Inner Gimbal Ring
C. Install Inner Gimbal Ring in Outer
Gimbal Ring
D. Test the Unit for Play (Movement) in the Outer Gimbal Ring Bearings
E. Install Inner/Outer Gimbal Ring Unit onto Wafer Manifold Plate
F. Test the Unit for Play (Movement) in the Inner Gimbal Ring Bearings
G. Install Three Jackscrew Assemblies in Back Side of Wafer Manifold Plate
H. Install Wafer Mounting Plate
I. Install Carrier Top Plate
J. Wafer Backing Plate Adjustment - for Three-, Four-, and Five-Inch Carriers Only
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