Maintenance Model 6DS-SP Planarizer
9 - 22 Version 4.0 - February 1998
8. Insert a 1/4-20 x 1/4-in. set screw in each of the two 1/4-in. threaded
holes located in the horizontal surface of the outer gimbal ring.
9. Using a 1/8-in. hex key, rotate each set screw clockwise to tighten,
securing each against the flat of the pin.
10. Remove each 10-32 assembly screw by rotating it counterclockwise.
Note: The inner and outer gimbal rings are now one unit.
D. TEST THE UNIT FOR .004 TO .005 INCHES OF PLAY
(MOVEMENT) IN THE OUTSIDE DIAMETER INNER GIMBAL
RING BEARINGS
Test Procedure
GOAL FOR
EACH
BEARING:
When measured with a feeler gauge, the gap
between the outside diameter bearing and the
spacer is between .004 and .005 in.
1. Using a feeler gauge, measure for correct gap (amount of play) in the
outside diameter gimbal ring bearings:
a. For each bearing, insert a feeler gauge between the bearing and the
spacer to measure the gap.
b. If the goal is not met for either bearing, correct by following the
procedure in the section immediately below.
c. If the gap for each bearing is correct, skip to Section E., Install
Inner/Outer Gimbal Ring Unit Onto Wafer Manifold Plate.
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