Maintenance Model 6DS-SP Planarizer
9 - 24 Version 4.0 - February 1998
6. Drop stainless shim washers onto each flange bearing as needed to meet
the goal.
7. Reinstall the bearings in the outside diameter holes of the inner gimbal
ring by repeating Section B., Steps 1. and 2., above, omitting Steps 2.g.
through 2.m. for inside diameter holes.
8. Reinstall the inner gimbal ring in the outer gimbal ring by repeating
Section C., above.
9. Retest for play by repeating the Test Procedure, above in this section.
a. Repeat the testing and correcting procedures until the goal is met.
b. When the goal is met, go on to Section E., immediately below.
E. INSTALL INNER/OUTER GIMBAL RING UNIT ONTO WAFER
MANIFOLD PLATE
1. Place the wafer manifold plate on the stainless steel workplate of the
bench top carrier fixture or on a solid workbench surface, positioned
with the four tapped flange holes facing up and the pin holes at the
edges of the plate oriented at 3 o’clock and 9 o’clock.
(Refer to Figure 9-10, below.)
2. Place the inner/outer gimbal ring unit over the wafer manifold plate,
positioning the unit such that the inside diameter flange bearings of
the inner gimbal ring are at 3 o’clock and 9 o’clock, as shown in the
figure below, and in alignment with the pin holes located at the edges
of the wafer manifold plate.
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