Strasbaugh 6DS-SP - Page 533

Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 25
12
6
3
9
X
X
inside diameter bearings
of inner gimbal ring
i
n
n
e
r
g
i
m
b
a
l
r
i
n
g
outer gimbal ring
w
afer manifold
plate
X
X
outside
diameter
bearings of
inner gimbal
ring
Figure 9-10 Orientation of Inner/Outer Gimbal Ring Unit Relative to the Wafer
Manifold Plate
3. Install inner spacers in the wafer manifold plate counterbores with the
flanges of the spacers mating to the counterbores:
a. While holding an inner spacer on each of your middle fingers (with
your fingers inserted in sides of the spacers opposite the flanges),
place one hand at 3 o’clock and the other at 9 o’clock,
and
grasp the inner/outer gimbal ring unit with your thumbs and
forefingers.
b. Lift the inner/outer gimbal ring unit straight up off the manifold
plate just high enough to insert the spacers in the two counterbores.
c. While continuing to hold the spacers with your middle fingers,
carefully set the inner/outer gimbal ring unit down onto the wafer
manifold plate, aligning the pin holes and trapping the spacers.