Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 27
8. Expose the second inner gimbal ring flange bearing hole:
a. Rotate the entire gimbal ring/manifold plate assembly 180 _ .
b. Pivot the outer gimbal ring to expose the second inner ring flange
bearing hole.
9. Install a assembly screw/inner gimbal pin unit in the second exposed
hole by repeating Step 7., above in this section.
F. TEST THE UNIT FOR .004 TO .005 INCHES OF PLAY
(MOVEMENT) IN THE INSIDE DIAMETER INNER GIMBAL
RING BEARINGS
Test Procedure
GOAL FOR
EACH
BEARING:
When measured with a feeler gauge, the gap
between the inside diameter bearing and the spacer
is between .004 and .005 in.
1. Using a feeler gauge, measure for correct gap (amount of play) in the
inside diameter gimbal ring bearings:
a. For each bearing, insert a feeler gauge between the bearing and the
spacer to measure the gap.
b. If the goal is not met for either bearing, correct by following the
procedure in the section immediately below.
c. If the gap for each bearing is correct, skip to Section G., Install
Three Jackscrew Assemblies In Back Side Of Wafer Manifold
Plate.
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