Maintenance Model 6DS-SP Planarizer
9 - 28 Version 4.0 - February 1998
Correction Procedure
Notes:
Correction is made by inserting stainless shim washers on the flange
bearings of the two inside diameter bearing holes of the inner gimbal
ring.
Use a feeler gauge to determine the number of washers needed to meet
the goal.
1. Pivot the outer gimbal ring to expose one of the two inside diameter
gimbal ring flange bearing holes.
2. Insert a 10-32 x 2 3/4-in. assembly screw into the threaded hole of the
inner gimbal pin, manually rotating the assembly screw clockwise
approximately three revolutions.
3. Using a 1/8-in. hex key, rotate the 1/4-20 x 1/4-in. set
screw locking the pin counterclockwise approximately two revolutions
to loosen.
4. Remove the pin by pulling on the assembly screw.
5. Expose the second inside diameter gimbal ring flange bearing hole:
a. Rotate the entire gimbal ring/manifold plate assembly 180 _ .
b. Pivot the outer gimbal ring to expose the second inside diameter
flange bearing hole.
6. Insert a 10-32 x 2 3/4-in. assembly screw into the threaded hole of the
inner gimbal pin, manually rotating the assembly screw clockwise
approximately three revolutions.
7. Using a 1/8-in. hex key, rotate the 1/4-20 x 1/4-in.
screw locking the pin counterclockwise approximately two revolutions
to loosen.
8. Remove the pin by pulling on the assembly screw.
9. Lift the inner/outer gimbal ring unit off the wafer manifold plate.
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