Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 29
10. Remove the flange bearings from the two inside diameter holes of the
inner gimbal ring:
a. Pivot the outer gimbal ring to provide access to the inner gimbal
ring.
b. While holding the inner gimbal ring in a vertical position with one
hand, palm up, supporting the ring from the outside with your
fingers surrounding one of the two inside diameter bearing holes,
insert the long end of the 6DS-SP flange bearing tool into the small
end of the inside diameter bearing.
c. Using a soft hammer, firmly tap the tool to knock the bearing out.
d. Remove the flange bearing tool.
e. Locate the second inside diameter bearing.
f. Repeat Steps a., b., and c., immediately above, to remove the
second inner diameter flange bearing from the inner gimbal ring.
11. Drop stainless shim washers onto each flange bearing as needed to meet
the goal.
12. Reinstall the bearings in the inside diameter holes of the inner gimbal
ring by repeating the following steps:
• Section B., Step 1.
• Section B., Steps 2.g through 2.k.
13. Reinstall the inner/outer gimbal ring unit onto wafer manifold plate by
repeating Section E., above.
14. Retest for play by repeating the Test Procedure, above in this section.
a. Repeat the testing and correcting procedures until the goal is met.
b. When the goal is met, go on to Section G., immediately below.
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