Maintenance Model 6DS-SP Planarizer
9 - 30 Version 4.0 - February 1998
G. INSTALL THREE JACKSCREW ASSEMBLIES IN BACK SIDE
OF WAFER MANIFOLD PLATE
1. Remove the stainless steel workplate from the top of the bench top
carrier fixture, exposing the opening in the fixture.
2. With the threaded holes in the gimbal rings facing up, set the gimbal
ring/manifold plate assembly on the bench top carrier fixture,
positioning the unit against the two locator pins of the maintenance
fixture and orienting as shown in the figure below.
GOAL: The back side of the manifold plate must be facing up.
How to Identify the Back Side of the Manifold Plate:
• The back of an eight-inch manifold plate has four holes showing
around its perimeter. The front has no holes showing.
• The back of a six-inch manifold plate has two 10-32 holes showing
around its perimeter.
• The back of a three-, four-, or five-inch manifold plate has four 8-
32 holes securing the top plate.
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