Maintenance Model 6DS-SP Planarizer
9 - 32 Version 4.0 - February 1998
For Eight-Inch Carriers Only:
5. Place a wedge of 1/4-in. O. D. tubing between the inner gimbal ring and
the manifold plate, preventing the plate from rotating:
a. Cut a two-inch long piece of 1/4-in. O. D. tubing.
b. Trim off 1/2 of the diameter for about one inch of the tubing length,
providing a soft 1/8-in. wedging tool.
c. Wedge the thin end of the tubing between the inner gimbal ring and
the manifold plate, securing the plate.
For All Carriers:
6. Manually install a 3/4-40 jack screw assembly into each of the three
holes in the back side of the wafer manifold plate by rotating each
clockwise.
7. Place one hand under the plate to feel for the protruding jack screws.
8. While feeling for a jack screw from underneath,
rotate the jack screw as needed to position it flush with the bottom of
the plate.
9. Repeat Step 8. for the other two jack screws.
GOAL: All three jack screws must be flush with the bottom of the
plate.
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