Maintenance Model 6DS-SP Planarizer
9 - 34 Version 4.0 - February 1998
e. Repeat Steps a., b., c., and d., immediately above until all three jack
screws meet the goal.
11. Install a 10-32 nylon elbow in the 10-32 hole of the wafer manifold
plate by manually rotating the elbow clockwise.
12. For Eight-Inch Carriers:
Using a 1/4-in. socket head wrench, install four 8-32 x 3/8 hex nylon
bumper screws in the four 8-32 holes located 90 _ apart on the wafer
manifold plate and inner gimbal ring by rotating each screw clockwise
to firm.
For Six-Inch Carriers:
The inner ring for the six-inch carrier has two 8-32 screws, and the
manifold plate has two 10-32 screws. Install bumper screws of
appropriate size in the four holes.
13. Release the pivoting ring retainers.
14. Rotate the manifold assembly 180 _ to reposition the assembly with the
square heads of the jack screws protruding down.
Note: The round ends of the jack screws will be facing up.
15. Relock the pivoting retainers.
16. Use a Strasbaugh Carrier Adjusting Tool Assembly (Strasbaugh
Indicator Depth Gauge Assembly - Item #233595) to measure and
confirm that each 3/4-40 jack screw is positioned correctly:
Goal for Eight-Inch Carriers Only:
GOAL: Each jack screw must protrude within +/- .001 in. of .125
in. (1/8 in.) beyond the bottom side of the plate.
Goal for Six-Inch Carriers Only:
GOAL: Each jack screw must protrude within +/- .001 in. of .140
in. beyond the bottom side of the plate.
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