Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 43
10. Set the power screwdriver for approximately 15 inch-pounds of torque.
11. Install the four 8-32 x 1/2 in. screws in the four 8-32 holes:
a. Insert the four screws into the holes.
b. Using the power screwdriver, tighten the screws to approximately
15 inch-pounds of torque.
12. Remove the carrier from the maintenance fixture.
13. Place the carrier on a solid workbench surface positioned with wafer
mounting side (the side with the small holes) up.
14. Install a carrier seal into the two grooves of the wafer side of the carrier.
15. Using isopropyl alcohol, clean the carrier seal and the entire face of the
carrier.
To Next Page
