Maintenance Model 6DS-SP Planarizer
9 - 44 Version 4.0 - February 1998
J. WAFER MOUNTING PLATE ADJUSTMENT - FOR THREE-,
FOUR-, AND FIVE-INCH CARRIERS ONLY
Notes:
This procedure adjusts the wafer pocket depth of the carrier.
Perform whenever the carrier is reassembled.
BEFORE YOU BEGIN
Tools and Parts Recommended
• 6DS-SP ACC 72 Carrier Tool Kit - Item #218327
Note: The Carrier Tool Kit includes the Carrier Adjusting Tool Assembly,
detailed immediately below.
Carrier Adjusting Tool Assembly (Strasbaugh Indicator Depth
Gauge Assembly) - Item #233595
Consisting of:
- Mitutoyo Indicator Depth Gauge - Item #218198
- Indicator Point, Flat Carbide - Item #218199
- Indicator Depth Gauge Holder - Item #218201
• 6DS-SP ACC 58 (125 mm) Carrier Spare Parts Kit - Item #225134
• 6DS-SP ACC 56 (100 mm) Carrier Spare Parts Kit - Item #225133
• 6DS-SP ACC 57 (75 mm) Carrier Spare Parts Kit - Item #225132
Note: Refer to the Appendix of this document for a bill of materials for
each of the six kits shown above.
• plastic block with hole in center large enough to permit carrier top plate
quill socket to extend down through the block while the block supports the
top plate
To Next Page
Loading...
