Strasbaugh Mechanical Maintenance Procedures
Version 4.0 - February 1998 9 - 45
• 6DS-SP Carrier Assembly Table - Item #220640
Note: The Carrier Assembly Table assembly includes the Bench Top
Carrier Fixture, listed below.
• 6DS-SP Bench Top Carrier Fixture - Item #219570
• retaining ring plier
• feeler gauge
• 1/4-in. socket wrench
Obtain the Pocket Depth Specification
The pocket depth is process-specific. The desired depth must be determined by
the thickness of the wafers to be processed, the thickness of the insert material
used, and the amount of wafer extension required.
In addition to adjusting the wafer backing plate, you may also insert shims for
additional adjustment of pocket depth.
Note that shims are available in .002-in. and .003-in. thicknesses.
To Next Page
