Maintenance Model 6DS-SP Planarizer
9 - 46 Version 4.0 - February 1998
CHECK CURRENT CALIBRATION
1. Remove the stainless steel workplate from the top of the bench top
carrier fixture, exposing the opening in the fixture.
2. With the threaded holes in the gimbal rings facing up, set the gimbal
ring/manifold plate assembly on the bench top carrier fixture,
positioning the unit against the two locator pins of the maintenance
fixture and orienting as shown in Figure 9-13, below.
GOAL: The back side of the manifold plate must be facing up.
How to Identify the Back Side of the Manifold Plate: The back of a
three-, four-, or five-inch manifold plate has four 8-32 holes securing
the top plate.
12
3
6
9
locator pins
pivoting
retainers
wafer manifold plate
inner
gimble ring
outer gimble ring
carrier maintenance fixture
locking block
swivel
elbow barb
Figure 9-13 Orientation of Gimbal Ring/Manifold Plate Unit on the Bench Top
Carrier Fixture
To Next Page
