Maintenance Model 6DS-SP Planarizer
9 - 74 Version 4.0 - February 1998
11. Locate the six 6-32 socket head cap screws securing the rectangular
cover located on the vertical side of the robot nearest the front of the
machine.
• Using a 7/64-in. hex key, remove the six 6-32 socket head cap
screws by rotating them counterclockwise.
12. Lift out the cover and set it aside.
13. Using a 3/16-in. hex key, remove the two 1/4-20 x 1/2 socket head cap
screws located inside the cover by rotating them counterclockwise.
14. Using a 5/32-in. hex key, remove the two 1/4-20 flat head socket head
cap screws located on the extension of the robot’s black base plate by
rotating them counterclockwise.
15. Lift the robot out of the machine.
C. LEVEL THE ROBOT
1. Place the robot on a surface plate with a specific flatness deviation of
less than .001 in.
WARNING: To be effective the leveling procedure must be
done on a surface which meets the flatness
requirement.
2. Remove the end effector connecting arm from the slide/belt connecting
arm:
a. Locate the two 6-32 socket head cap screws mounted underneath
the slide plate.
b. Using a 7/32-in. hex key, remove the two 6-32 socket head
capscrews by rotating them counterclockwise.
3. Remove the slide assembly cover:
a. Using a 7/32-in. hex key, remove the five 6-32 socket head
capscrews securing the slide assembly cover by rotating them
counterclockwise.
b. Lift the cover off and set it aside.