Maintenance Model 6DS-SP Planarizer
9 - 100 Version 4.0 - February 1998
B. CHECK CURRENT CALIBRATION
1. Place a cassette on the left send elevator. Place the elevator arm down
on top of the cassette.
2. At Page 1 of the Manual Control Menu select Robot Move and choose
Left Send to move the robot out of the way.
3. Select Bridge Move and choose Load to move the bridge to its load
position.
4. Select Shuttle Move and choose Rear to move the shuttle assembly to its
wafer/carrier cleaning position, nearest the rear of the machine.
5. Open the Left Side Operator Door.
6. Position the right cleaning station:
a. With a 9/16-in. socket wrench, loosen the four hex head bolts at the
base of the right cleaning station by rotating them
counterclockwise.
b. By hand, push the right cleaning station to the rear as far as it will
go.
7. Center the right cleaning station and measure:
a. Move the station forward .0625 in.
b. Measure with a scale from the front edge of the shuttle assembly top
plate to the front of the right cleaning station to confirm position.
8. Retighten the four hex head bolts to firm.
9. Close the door.
10. At Page 2 of the Manual Control Menu select Right Spindle Up/Down
and choose Down to lower the right spindle.
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