Maintenance Model 6DS-SP Planarizer
9 - 174 Version 4.0 - February 1998
REINSTALLATION OF THE LOAD CHUCKS,
TABLE, AND SUBTABLE
A. BEFORE YOU BEGIN
Tools Required
• 1/2-in. combination box and open end wrench
• 9/16-in. open end wrench or universal socket wrench
• 7/16-in. open end wrench
• 3/4-in. combination box and open end wrench
• mirror attached to a long handle
• 6-mm hex key
• 7/32-in. hex key
• 1/2-in. socket wrench
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