Maintenance Model 6DS-SP Planarizer
9 - 176 Version 4.0 - February 1998
4. Reinstall the table:
NOTICE: The procedure below is a two-person job!
a. Turn the machine power to OFF by pressing the red <EMERG
OFF> button located on the Control Panel.
b. Set the table in place.
c. Replace the four 1/2-13 hex head capscrews which secure the table
to the subtable, using a 3/4-in. combination box and open end
wrench to rotate them clockwise to firm.
5. Reinstall the stainless steel pan:
a. Set the pan in place.
b. Replace the four 1/4-20 hex head capscrews, mounted in pairs at
each end of the pan on the black vertical pan supports.
c. Using a 7/16-in. open end wrench, tighten the capscrews by rotating
them clockwise to firm.
6. Reinstall the left load chuck platform and ring:
a. Set the platform and ring in place.
b. Using a 9/16-in. open end wrench or 9/16-in. universal socket
wrench, tighten the two 3/8-16 hex head bolts mounted on the
vertical surfaces of the load station adapter plate by rotating them
clockwise to firm.
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