Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 49
CONTROLLABLE CONDITIONING
DOWN FORCE OPTION CALIBRATION
[#5 IN CONDITIONING ARM ADJUSTMENT SERIES]
CALIBRATION VARIABLES SET DURING THIS PROCEDURE
71 Cond force dead weight (lbs)
The "zero" calibration for the
conditioning down force.
72 Cond force scale factor
Nominal value: 1
The "span" calibration for the
conditioning down force.
SUMMARY
• Power up and home the machine.
Install polishing pad.
• Perform the E-P calibration.
• Establish the dead weight of the conditioning device.
• Test the scale factor.
• Calibrate the scale factor.
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