Maintenance Model 6DS-SP Planarizer
10 - 50 Version 4.0 - February 1998
A. BEFORE YOU BEGIN
Tools Required
• Strasbaugh Load Cell Carrier Kit
• Sensotec Portable Indicator
• 5/32-in. hex key
• small flat blade screwdriver
• 60-LB pressure gauge with 2 four-inch pieces of hose and a
T fitting attached
• scale capable of weighing approx. five-pound object (such as a postage scale)
Turn Machine Power On and Perform Home Sequence Routine
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
Install a Polishing Pad on the Table
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
B. PERFORM THE E - P CALIBRATION
1. At the Diagnostics Menu, select Change Counter and enter 57 to choose
Pad Conditioning Control.
2. Enter 0 to change Pad Conditioning Control to 0.
3. Open the right side electrical cabinet service doors.
4. Locate the Fairchild E-P regulator, mounted at the right rear of the
machine (as you are facing the rear of the machine).
Refer to engineering drawing #217946EM, in the Appendices of the
6DS-SP Maintenance manual.
5. Find and disconnect tube # 96:
a. Locate the tube extending from the regulator labeled # 96.
b. Depress the fitting and detach tube # 96 from the regulator.
To Next Page
Loading...
