Maintenance Model 6DS-SP Planarizer
10 - 68 Version 4.0 - February 1998
UNIVERSAL WAFER CASSETTE
SUPPORT
This features permits the 6DS-SP software to be adjusted for use of cassettes
with any number of slots and any slot spacing (within the mechanical move
limits of the elevators).
CALIBRATION VARIABLES
84 Cassette slot spacing
(REHOME)
The actual cassette slot spacing in inches. This should match the
spacing for the manufacturer's cassettes used which may be slightly
different from the nominal spacing. Elevators will be "unhomed" if
this variable is changed, requiring re-homing.
85 # of slots in cassette
(REHOME)
The number of slots in the cassettes being used. Elevators will be
"unhomed" if this variable is changed, requiring re-homing.
86 Dunk distance (slots)
(REHOME)
The distance, expressed in number of slots, from the wafer loading
plane to just below the water level which is nominally 3". (Nominal
number of dunk distance slots equals 3" divided by cassette slot
spacing.) Elevators will be "unhomed" if this variable is changed,
requiring re-homing.
If any of the above variables is changed, the elevators will be "unhomed",
requiring rehoming. This prevents any elevator movements until all values are
changed to reasonable values.
Variable 84 is set to the actual slot spacing. (This might be slightly different
from the nominal spacing due to manufacturing tolerances of a particular
manufacturer's cassette. Wafer handling problems may occur if variable 84 is
too different from the actual slot spacing.)
Variable 85 is simply set to the number of slots in the cassette.
Variable 86 represents the distance, expressed in number of slots, required to
lower a slot from the wafer loading plane to a point just below the elevator tank
water surface. This distance is typically 3 inches; it can be calculated as follows:
Dunk distance = 3 " / Nominal slot spacing
The following table shows typical "dunk distance" values for common cassette
slot spacings.
Cassette Slot Spacing “Dunk Distance (in slots)
3/16 in. 16
1/4 in. 12
3/8 in. 8
3/4 in. 4
To Next Page
Loading...
