Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 69
LOAD STATIONS
LOAD CHUCK VACUUM SENSOR
ADJUSTMENT
Notes:
• Wafer presence on a load chuck is determined by sensing the vacuum quality
at the load chuck. High vacuum indicates all load chuck holes are blocked
(wafer present). Low vacuum indicates that at least one load chuck hole is
not covered by a wafer (wafer absent).
• Refer to the Manufacturer’s Documentation section of this manual for
detailed information on the SUNX Digital Pressure Sensor.
A. BEFORE YOU BEGIN
Tools Required
• two test wafers
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