Maintenance Model 6DS-SP Planarizer
10 - 70 Version 4.0 - February 1998
Power Up and Home
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
B. PERFORM THE ADJUSTMENT
1. Read the LCD displays of the left and right vacuum sensors, mounted at
the left side of the Polish Area Left Operator Door.
Both sensors should be displaying approximately 0.
Note: The displays are in negative psi.
2. At Page 1 of the Manual Control Menu, select Left Load Chuck
Up/Down and choose Up to raise the left load chuck.
3. At the Diagnostics Menu, select Toggle Output and enter 13 to turn
Output 13 (Left Load Chuck Vacuum) ON.
(Right Load Chuck Vacuum = Output 14)
4. Read and record the left vacuum sensor readings as “wafer absent”:
Left Wafer Absent Reading: ______
5. Open the polish area left side operator door.
6. Place a test wafer on the left load chuck.
7. Read and record the left vacuum sensor reading with the wafer in place
as “wafer present”:
Left Wafer Present Reading: ______
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