Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 71
8. Calculate the AVERAGE of the Left Wafer Absent and Left Wafer
Present Readings:
Note: The sensors should perform similarly enough that the same
average value can be used for both sensors.
AVERAGE = Left Wafer Absent Reading + Left Wafer Present Reading
2
Example:
AVERAGE = - 6.8 + (- 6.4)
2
AVERAGE = - 13.2
2
AVERAGE = - 6.6
9. At the left load chuck sensor display enter the AVERAGE value as the
M1 setpoint:
a. Press the Mode Select Switch, located to the right of the Down
Arrow (Set-up Decrement Key), until “M1” is displayed.
b. Using the Up and Down Arrow keys, set the value of M1 to the
value calculated above (for example, - 6.6).
10. Calculate the value of the M2 setpoint:
M2 = Value Of M1 (Calculated AVERAGE) + 0.1
Example:
M2 = - 6.6 + 0.1
M2 = - 6.5
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