Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 73
8. At the Diagnostics screen, read the status of inputs 15 and 16:
GOALS:
Input 15 should be ON when a wafer is present on the left load
chuck
and
Input 16 should be ON when a wafer is present on the right
load chuck.
Notes:
• A slight stabilization delay (typically one second) will be seen at
several points in the automatic cycle after load chuck vacuum is
applied. At the end of a manual cycle, wafer presence is briefly
checked every five seconds. Thus, the load chucks will lower shortly
after wafers are manually removed while leaving vacuum released
most of the time, permitting the operator to pick up a wafer.
• If the lines are full of water, you may need to let the lines clear by
leaving vacuum on for several seconds with no wafers.
a. If the goals in Steps 5., 7., and 8., above in this section, are met,
skip to When a Satisfactory Adjustment Is Achieved, below.
b. If the goals are not met, check for vacuum leaks or stoppages.
D. WHEN A SATISFACTORY ADJUSTMENT IS ACHIEVED
1. Remove the test wafers.
2. Close all doors to the machine.
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