Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 81
2. Set the value for variable 76, RTZ robot send rotate position to -4000.
3. Set the value for variable 77, RTZ robot receive rotate position, to -
4000.
4. Set the value for variable 78, RTZ robot left load rotate position, to
4000 for single table machines (5100 for two table machines).
5. Set the value for variable 79, RTZ robot right rotate position, to 2900.
C. TEST EACH POSITION AND ADJUST IF NEEDED
Variable 76
1. Remove the wafer cassettes from the elevators.
2. At Page 1 of the Manual Control Menu, select Robot Move and choose
Left Send to move the robot to the left send elevator.
(Left Receive)
(Left Load)
(Right Load)
3. Select Robot Arms Move and choose Left Send to move the robot arm
into the left send elevator.
(Left Receive)
(Left Load)
(Right Load)
4. Evaluate the arm position and, if needed, at the
Calibration/Configuration Menu make small changes to the
recommended count value for variable 76 to position the robot arm
accurately.
GOAL: Refer to Calibration Variables Set During this Procedure, above,
for position goals and recommended count values.
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