Maintenance Model 6DS-SP Planarizer
10 - 84 Version 4.0 - February 1998
105 Left recv robot position
• Nominal value: -36 in.
• The distance, in negative inches, from the robot home position to the center of the left
receive station.
and
112 Robot arm(s) position LT rec
• Nominal value: 50000
• A value, in counts, required to move the RTZ robot's single arm into the left receive
cassette.
106 Right recv robot position
• Nominal value: -25 in.
• The distance, in negative inches, from the robot home position to the center of the
right receive station.
and
113 Robot arm(s) position LT rec
• Nominal value: 50000
• A value, in counts, required to move the RTZ robot's single arm into the right receive
cassette.
Notes:
• Robot arm extensions and travel positions are calibrated to position the end
effector directly over the wafer center at the four elevator stations. Note,
however, that a small safety distance is allowed at the receive cassettes to
prevent wafers from getting jammed against the back of the cassette.
• Arm extension "count" values for the RTZ robot will typically be
approximately 40,000 to 50,000 where the two arm robot had values nearer to
3,000.
Required Positions for Robot Arm Extension
To permit the robot to safely extend its arm (move radially), the robot’s Z-axis
must first be in a up/down position, as shown below:
• At the send elevators, the robot must be at its up/down top position.
• At the receive elevators, the robot must be at its up/down middle position.
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