Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 85
LEFT SEND
A. BEFORE YOU BEGIN
Tools Required
• felt tip pen
• test wafer
• precision scale (accurate to .03125 in.)
Turn Machine Power On and Perform Home Sequence Routine
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
B. PREPARE AN ALIGNMENT GUIDE WAFER
1. At Page 1 of the Manual Control Menu, select End Effector On/Off and
choose On to turn robot end effector vacuum "on".
2. Taking care to center the wafer under the chuck, manually hold a dry
test wafer under the robot arm end effector vacuum chuck until the
wafer takes vacuum.
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