Maintenance Model 6DS-SP Planarizer
10 - 90 Version 4.0 - February 1998
1. Note whether the arm is positioned too near the polish table or too far
away from the polish table.
2. At the Calibration/Configuration Menu increase/decrease the value of
variable 103, Left send robot position, as needed to meet the goal of
linear alignment within the target of the guide wafer:
Note: Changing the value of variable 103 while the robot is in its left
send position via the Manual Control Menu automatically
repositions the robot to the new location.
a. Increase/decrease the variable value as needed.
b. Reevaluate the robot position, and readjust the variable value if
needed.
c. Repeat checking and adjusting until the goal has been met.
3. Check the new position against the goal and repeat the positioning
adjustment in smaller increments as needed.
4. Refer to the Summary Sequence, above, and, if needed, correct the
positioning of the axis of lesser error.
Radial (In/Out) Positioning Correction
Notes:
• The robot arm(s) radial positioning variable values are expressed in counts.
A nominal value for the RTZ robot arm position variable at the elevator is
50000.
• The positioning is corrected by increasing or decreasing the current value of
the variable in 500 count increments as needed. 500 counts is approximately
equal to .1 inch.
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