Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 91
Use the following guidelines when making adjustments:
• The smaller the count number, the nearer the robot arm is to the robot
carriage.
If the arm is too near the robot carriage, move the arm away from the
robot carriage by increasing the current value of the variable by 500-
count increments.
• The larger the count number, the farther the robot arm is extended from
the robot carriage.
If the arm is too far away from the robot carriage, move the arm toward
the robot carriage by decreasing the current value of the variable by
500-count increments.
Procedure:
1. Note whether the arm is positioned too near the robot carriage or too
far away from the robot carriage.
2. At the Calibration/Configuration Menu increase/decrease the value of
variable 110, Robot arms LT send position, as needed to meet the goal
of radial alignment within the target of the guide wafer:
Note: Changing the value of variable 110 while the robot arm is in its
left send position via the Manual Control Menu automatically
repositions the robot arm to the new location.
a. Increase/decrease the variable value as needed.
b. Reevaluate the robot position, and readjust the variable value if
needed.
c. Repeat checking and adjusting until the goal has been met.
3. Check the new position against the goal and repeat the positioning
adjustment in smaller increments as needed.
4. Refer to the Summary Sequence, above, and, if needed, correct the
positioning of the axis of lesser error.
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