Strasbaugh 6DS-SP - Page 785

Maintenance Model 6DS-SP Planarizer
10 - 94 Version 4.0 - February 1998
AT THE LOAD STATIONS -- ROBOT ARM
EXTENSION (RADIAL) AND TRAVEL (LINEAR)
CALIBRATION
CALIBRATION VARIABLES SET DURING THIS PROCEDURE
107 Left load robot position
• Nominal values:
-10 in. for single table machines
-5 in. for two table machines
• The distance, in negative inches, from the robot home position to the center of the left
load station if the RTZ robot is used on a single table machine. If the RTZ robot is
used on a two table machine, this will be a distance to the right of the load station.
and
114 Robot arm(s) position LT load
• Nominal value: 50000
• A value, in counts, required to move the RTZ robot's single arm into the left load
station.
108 Right load robot position
• Nominal value: 0 in.
• The distance, in negative inches, from the robot home position to a position near the
load station.
and
115 Robot arm(s) position LT load
• Nominal value: 50000
• A value, in counts, required to move the RTZ robot's single arm into the right load
station.
Required Position for Robot Arm Extension
To permit the robot to safely extend its arm (move radially), the robot’s Z-axis
must first be in a specific up/down position, as shown below:
• At the load stations, the robot must be at its up/down above load position.
Notes:
• The arm extension and linear robot positions are calibrated to position the end
effector directly over the wafer center at the load stations. Arm extension
"count" values for the RTZ robot will typically be approximately 40,000 to
50,000 where the two arm robot had values nearer to 3,000.