Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 95
• In a two table machine, the left load linear robot position must be
significantly different for the RTZ robot from that of the two arm robot. The
linear robot should be positioned off center to the right of the load station to
make sure the robot arm extends through the load station cutout. This
position is actually a mirror image of the right load station calibration which
always has the robot off center to the left.
LEFT LOAD
A. BEFORE YOU BEGIN
Tools Required
• test wafer
• precision scale (accurate to .03125 in.)
Turn Machine Power On and Perform Home Sequence Routine
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
To Next Page
Loading...
