Maintenance Model 6DS-SP Planarizer
10 - 104 Version 4.0 - February 1998
ROBOT UP/DOWN (Z-AXIS) LOAD
POSITIONS CALIBRATION
[#7 IN ELEVATORS AND ROBOT ADJUSTMENT SERIES]
CALIBRATION VARIABLES SET DURING THIS PROCEDURE
130 Robot up/dn above load pos'n
Nominal value: 0 in.
Value, in inches, to move the robot's up/down
axis to a position below the home position that is
comfortably above the load station chucks.
Usually set to zero.
131 Robot up/dn left load pos'n
Nominal value: 0.4 in.
Value, in inches, to move the robot's up/down
axis to a position below the home position that
will contact a wafer sitting on the raised left load
chuck.
132 Robot up/dn right load pos'n
Nominal value: 0.4 in.
Value, in inches, to move the robot's up/down
axis to a position below the home position that
will contact a wafer sitting on the raised right load
chuck.
ROBOT UP/DOWN ABOVE LOAD POSITION
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