Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 105
A. BEFORE YOU BEGIN
Tools Required
• precision scale (accurate to .03125 in.)
• test wafer
Turn Machine Power On, Perform Home Sequence Routine, and Install Carriers
on Spindles
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
B. CHECK CURRENT CALIBRATION
1. At Page 1 of the Manual Control Menu, select Bridge Move and choose
Pol Tbl 1 to move the bridge to polish position.
2. Select Robot Move and choose Left Load to move the robot to the left
load station.
3. Select Robot Up/Dn Move and choose Above Load to move the robot
Z-axis to its above load position.
4. Select End Effector On/Off and choose On to turn robot end effector
vacuum "on".
5. Manually hold a test wafer under the robot arm end effector vacuum
chuck until the wafer takes vacuum.
6. Select Robot Arms Move and choose Left Load to move the robot arm
to its extended position out over the left load station.
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