Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 117
SLURRY SYSTEM
SLURRY FLOW CALIBRATION
Slurry flow is determined by the shaft speed of the peristaltic pump motor. The
head of the peristaltic pump is designed to pump a fixed volume of fluid per
shaft revolution. The actual flow rate also depends on the size of the tubing used
for the slurry delivery lines, tubing age, and flow resistance in the slurry line
plumbing. Calibration therefore becomes necessary. Calibration is performed
by adjusting the peristaltic pump motor shaft speed.
Notes:
• Measured flow rates may not be linear over the entire flow range. Therefore
Strasbaugh recommends that the slurry flow calibration be performed at
those flow rates requiring the highest accuracy.
• Be sure to perform the Slurry Diaphragm Pump Pressure adjustment,
found in the Pneumatic Adjustments chapter of this manual, before
beginning the Slurry Flow Calibration procedures.
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