Strasbaugh 6DS-SP - Page 809

Maintenance Model 6DS-SP Planarizer
10 - 118 Version 4.0 - February 1998
CALIBRATION VARIABLES SET DURING THIS PROCEDURE
10 Slurry 1 flow factor
Nominal value: 1
The "span" calibration for the Slurry 1
peristaltic pump. This is calibrated by
measuring the flow over a period,
calculating the error, multiplying the
original factor by the error and entering
the result.
20 Slurry 2 flow factor
Nominal value: 1
The "span" calibration for the Slurry 2
peristaltic pump. This is calibrated by
measuring the flow over a period,
calculating the error, multiplying the
original factor by the error and entering
the result.
75 Pump 3 flow factor
Nominal value: 1
The "span" calibration for the Pump 3
peristaltic pump. This is calibrated by
measuring the flow over a period,
calculating the error, multiplying the
original factor by the error and entering
the result.
SLURRY FLOW 1 CALIBRATION
A. BEFORE YOU BEGIN
Tools Required
• 2000 ML graduated beaker
• stopwatch
Turn Machine Power On and Perform Home Sequence Routine
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
B. CHECK THE CURRENT CALIBRATION
1. At Page 3 of the Manual Control Menu, enter a programmed flow rate
test value for Slurry Flow 1 of 600 ML/MIN.