Strasbaugh 6DS-SP - Page 811

Maintenance Model 6DS-SP Planarizer
10 - 120 Version 4.0 - February 1998
C. ADJUSTMENT PROCEDURE
1. At the Calibration/Configuration Menu, select Page Down to display
variable 10, Slurry 1 flow factor.
Example: .98
2. Calculate the new calibration value for the slurry 1 flow factor variable:
NEW = Programmed Flow Rate
x
Current Value
CALIBRATION ACTUAL FLOW (from screen)
VALUE
Example:
NEW = 600 x .98
CALIBRATION 480
VALUE
NEW = 1.225
CALIBRATION
VALUE
3. Enter the new calibration value for variable 10, Slurry 1 flow factor.
Example: 1.225
D. TEST THE NEW ADJUSTMENT
Repeat Section B. (Check the Current Calibration) to test.
E. WHEN SATISFACTORY ADJUSTMENT IS ACHIEVED
1. Open the Right Side Operator Door.
2. Remove the beaker.
3. Close the Right Side Operator Door.