Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 125
SPINDLES
BACKPRESSURE CALIBRATION
This procedure calibrates the back pressure system components and checks left
versus right performance.
Notes:
The procedure below was written for the left spindle. Repeat for the right
spindle making appropriate substitutions as shown in the text below.
This procedure will probably damage the pad.
BEFORE YOU BEGIN
Tools Required
• small flat blade screwdriver
• 60-LB pressure gauge with 2 four-inch pieces of hose and a
T fitting attached
• two test wafers
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