Maintenance Model 6DS-SP Planarizer
10 - 144 Version 4.0 - February 1998
Turn Machine Power On and Perform Home Sequence Routine
Follow the procedures detailed in the Operator Functions chapter of the 6DS-SP
Operations manual.
Install Polishing Pad on Table and Remove Carriers from Spindles
Follow procedures detailed in the Operator Functions chapter of the
6DS-SP Operations manual.
At the Machine Parameters Menu, Set Left and Right Force Scaling to 100%
Following procedures detailed in the Machine Setup chapter of the
6DS-SP Operations manual, at Page 1 of the Machine Parameters Menu, set
both Left Force Scaling and Right Force Scaling to 100%.
B. WEIGH CARRIERS AND ADJUST SENSOTEC INDICATOR
1. Weigh the Strasbaugh Load Cell Carrier and the two carriers you
removed earlier. Record the weights.
Example: Left Carrier Weight: 25.0 lbs.
Right Carrier Weight: 24.5 lbs.
Load Cell Carrier Weight: 8.0 lbs.
2. At Page 1 of the Manual Control Menu, select Bridge Move and choose
Pol Tbl 1 to move the bridge to polish position.
3. At Page 2 of the Manual Control Menu, select Left Spindle VAC
On/Off and choose On to turn vacuum on to the left spindle.
4. Open the Polish Area Right Side Operator Door.
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