Maintenance Model 6DS-SP Planarizer
10 - 152 Version 4.0 - February 1998
2. RIGHT SPINDLE
Repeat as for left spindle, making the following substitutions to duplicate the
polish force calibration procedures for the right spindle:
1. At the Calibration/Configuration Menu:
44 = RIGHT SPINDLE DEAD WEIGHT
variable
43 = RIGHT SPINDLE FORCE SCALE
FACTOR variable
2. Substitute right for left in the text of the procedure.
3. WHEN LEFT AND RIGHT SPINDLE POLISH FORCE
HAVE BEEN CALIBRATED
When left and right spindle polish force have both been calibrated, input process
force values for both spindles and compare:
GOAL:
To prevent uneven polish rates, the measured force
values shown on the Sensotec Portable Indicator
display for the two spindles must be within +/- 5 lbs.
of equal.
1. Obtain polish force values used in your processing from the process
supervisor or engineer.
2. Input a value for both left and right spindle force at Page 2 of the
Manual Control Menu.
Example: 250
3. Reinstall the Load Cell Carrier and Sensotec Indicator on the left
spindle (repeat from Section B., above).
4. Record as Actual Left Force the value displayed on the Indicator.
Example: Actual Left Spindle Force: 247
5. Remove the Load Cell Carrier and Indicator from the left spindle and
reinstall on the right spindle.
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