Maintenance Model 6DS-SP Planarizer
10 - 158 Version 4.0 - February 1998
WAFER BLOW OFF PRESSURE
CALIBRATION
CALIBRATION VARIABLES SET DURING THIS PROCEDURE
170 Approx. wafer blowoff (psi)
Nominal value: 20 psi.
Sets the pressure that will be used
for wafer blowoff during wafer
unloading.
A. BEFORE YOU BEGIN
Tools Required
• test wafers
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