Maintenance Model 6DS-SP Planarizer
10 - 168 Version 4.0 - February 1998
TABLE TEMPERATURE CONTROL
UNIT OPERATION
Strasbaugh ships either a Filterine or Neslab temperature control unit with the
6DS-SP planarizer. Follow the procedure appropriate to your unit.
FILTERINE TEMPERATURE CONTROL UNIT
POWERING UP
At The 6DS-SP
1. Power up the 6DS-SP (follow procedures detailed in the Operator
Functions chapter of the 6DS-SP Operations manual).
At the Filterine Temperature Control Unit
2. Power up the Filterine unit at its main disconnect switch.
3. Press the green <MACHINE ON> button at the front of the Filterine
unit.
4. Press the <PUMP ON> toggle switch to turn the Filterine unit’s pump
on.
5. Open the controller access door mounted at the front of the Filterine unit
to locate the Omron controller.
6. Press the ⇑ and ⇓ (up and down) arrow keys as needed until the
numbered display shows the desired temperature.
7. Close the access door.
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