Strasbaugh 6DS-SP - Page 860

Strasbaugh Software Calibration Procedures
Version 4.0 - February 1998 10 - 169
POWERING DOWN
At the Filterine Temperature Control Unit
1. Press the <PUMP ON> toggle switch to turn the Filterine unit’s pump off.
2. Move the main disconnect switch of the Filterine unit to its off position.