Strasbaugh 6DS-SP - Page 928

Maintenance Model 6DS-SP Planarizer
13 - 16 Version 4.0 - February 1998
POWER GOES OFF DURING CYCLE
Problem
Indicator
Problem
Location
Component/ Cause Resolution/
Responsibility
ALL LIGHTS
AND SCREEN
DISPLAY GO
OFF
Control Panel;
Monitor Screen
(1) Service door(s)
open.
2) Facilities power
off.
(3) Tripped circuit
breaker (possible
overload).
(1a) If robot is holding
wafer, carefully
remove wafer. (See
Procedures For Safe
Removal Of Wafer
From Robot in
Operator Functions
chapter of Operations
manual.)
(1b) Check and close
all doors to machine.
(1c) Power up and
home the machine.
(1d) Return to the
Auto Polish Menu and
begin a new cycle.
(2a) Check facilities
power.
OPERATIONS
(3a) Check circuit
breaker box and
restore.
MAINTENANCE